USING STRAIN GAUGES POLIKREMNIEVYH-TYPE IN MESA PRESSURE SENSORS                              FOR THE MANAGEMENT AND CONTROL SYSTEMS

Barinov Il'ya Nikolaevich, candidate of technical sciences, head of department, Research Institute of Physical Measurements, mzungu@inbox.ru
Volkov Vadim Sergeevich, candidate of technical sciences, senior stuff scientist, Research Institute of Physical Measurements, distorsion@rambler.ru

621.3.032

The article cites describes use of polycrystalline silicone mesa strain gages for pressure sensors. The new sensor element construction, improving characteristics, is described.

pressure sensor, strain gauge, polycrystalline silicone, mesa structure.