THE MODERN TRENDS OF PRESSURE TRANSDUCERS WITH FREQUENCY OUTPUT

Volkov Vadim Sergeevich, candidate of technical sciences, associate professor, sub-department of instrument making, Penza State University, distorsion@rambler.ru
Kudryavtseva Daria Aleksandrovna, postgraduate student, Penza State University, mzungu@inbox.ru
Vergazov Ilyas Rashitovich, chief engineer, Scientific-research Institute of physical measurement, mzungu@inbox.ru

621.3.032

The constitutive advantages of MEMS-based resonant measuring transducers for mechanical quantities measurement and pressure transducers with frequency output signal are reviewed. The advantages of monocrystalline silicone for micromechanical resonator manufacturing are shown. The disadvantages of existing resonant pressure transducer are analyzed and advanced design of resonant pressure transducer with high stability and increased sensitivity is analyzed. The decreasing of pressure sensor temperature error based on frequency transducer of bridge circuit is shown.

MEMS technology, pressure sensor, silicone resonant transducer, strain gauge, feedback, temperature error, frequency output signal.