ON STUDY THE POSSIBILITY OF DEVELOPING INERTIAL MODULES ON THE BASIS OF DOMESTIC METHODS
OF HIGH-VOLUME MICROMECHANICS 

Dmitrienko Aleksey Gennad'evich, candidate of technical sciences, director general, Scientific-research Institute
of physical measurements, niifi@sura.ru
Papko Antonina Alekseevna, doctor of technical sciences, chief designer, Scientific-research Institute of physical measurements, inercial@niifi.ru
Torgashin Sergey Ivanovich, director of production, Scientific-research Institute of physical measurements, niifi@sura.ru
Kiryanina Irina Vladimirovna, deputy head of research and development department – head of division, Scientific-research Institute of physical measurements, niifi@sura.ru

 629.7.072.1

Efficiency of solving moving craft navigation problems mostly depends on the quality of inertial measuring cells comprising accelerometers and angular velocity sensors. In platformless inertial systems to determine velocity and coordinates accelerometer output signal is double integrated. Acceleration direction data at that is received from angular velocity sensors providing reference frame for accelerometers. Currently urgent are investigations and developments of micromechanical inertial measuring cells providing essential improvement of mass-dimensional and energy characteristics of navigation systems. The paper deals with structural and technological peculiarities of their realization.

micromechanical inertial measuring cells, micromechanical angular velocity sensors, micromechanical accelerometers, platformless inertial navigation systems, 3d micromechanics technologies, MEMS technologies, VLSI.