SIMULATION TECHNIQUE PICKUP TENZOREZISTIV ABSOLUTE PRESSURE SENSOR

Musaev Ruslan Shabanovich, candidatе of technical sciences, head of the research design complex, Research Institute of Physical Measurements, polim@mail.ru
Trofimov Aleksey Anatol'evich, doctor of technical sciences, deputy head of ESC 37, Research Institute of Physical Measurements, umc37@mail.ru
Frolov Mikhail Alekseevich, head of the research laboratory of information technologies, Research Institute of Physical Measurements, skrash1987@mail.ru

004.94

Calculation of a sensing element from an absolute pressure sensor with the help of finite element analysis using Simulation module as part of the SolidWorks software has been given. Calculation results allowed to develop design of a sensor rising to all stringent requirements and stated metrological characteristics.

sensor, sensing element, pressure, solid stat modeling, finite element analysis.