| Authors |
Zinchenko Timur Olegovich, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: scar0243@gmail.com
Pecherskaya Ekaterina Anatolevna, doctor of technical sciences, associate professor, head of sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pea1@list.ru
Kondrashin Vladislav Igorevich, director of Center for Youth Innovation Creativity «Paradigma» (51 Kirova street, Penza, Russia), E-mail: nauka-fpite@mail.ru
Spitsyna Kseniya Yur'evna, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: ksenya.kraynova.94@mail.ru
Fimin Andrey Vladimirovich, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: mr.l0tus@mail.ru
Melnikov Oleg Andreevich, postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: oleg-068@mail.ru
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| Abstract |
Background. Transparent conductive oxides, which are thin-film coatings (semiconductor metal oxides, polymers, carbon structures) with high electrical conductivity and good optical transparency, are promising materials in solar cells, smart glasses, and are used in functional electronics. The purpose of the study is to analyze the dependences of the electrophysical parameters of SnO2 films on the impurity concentration and solution volume, which allows us to establish optimal technological conditions for producing oxide coatings with improved properties.
Materials and methods. To obtain SnO2 films, the spray pyrolysis method was used – one of the most promising methods from the point of view of applying transparent conductive coatings to large-area substrates. Sodium-calcium-silicate glasses were used as substrates. The SnO2 films were deposited from solutions containing tin pentahydrate tetrachloride (SnCl4 ∙ 5H2O), and ethanol was used as a solvent. The four-probe method and the van der Pauw method were used to measure the electrophysical parameters of the films.
Results. As a result of the experiments, the electrophysical parameters of the samples of transparent conductive oxides obtained under different technological conditions were determined. The dependences of the surface resistance and charge carrier mobility on the impurity concentration were plotted, which allowed us to analyze the scattering mechanisms present in oxide films.
Conclusions. The theory was confirmed that scattering by ionized impurities in transparent conducting oxides is the main mechanism limiting the mobility of charge carriers. Critical values of the impurity concentration are established, with an increase in which the quality of the synthesized films deteriorates due to an increase in surface resistance and a decrease in the mobility of charge carriers. These conclusions were used in determining the optimal technological conditions.
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| Key words |
transparent conductive oxides, tin dioxide, spray pyrolysis method, scattering mechanisms, surface resistance, impurity concentration, charge carrier mobility
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