PHYSICAL AND CHEMICAL BASES OF THE ANODE COMPOUND
OF MICROELECTROMECHANICAL SYSTEMS ELEMENTS 

Pautkin Valeriy Evgen’evich, candidate of technical sciences, chief specialist, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), E-mail:gorvlad1@yandex.ru 

621.791.052 

10.21685/2307-5538-2019-2-11 

Background. The physicochemical principles of the formation of sensitive elements of micromechanical accelerometers by the methods of anode connection are considered. The aim of the work is to analyze the physical effects leading to the creation of a permanent connection of parts.
Materials and methods. Used the provisions of physical chemistry, solid state physics in the consideration of this issue.
Results. Recommendations for improving the anodic silicon-glass process are proposed.
Conclusions. The use of anode connection in the assembly of sensitive elements allows you to create sensors that are characterized by small dimensions, high performance. 

anodic compound, alkaline glass, solid-phase electrolysis, sensitive element, sensor