AUTOMATED INFORMATION-MEASURING SYSTEM FOR MEASUREMENT OF VOLTAGE CHARACTERISTICS OF SEMICONDUCTOR STRUCTURES 

Ekaterina A. Pecherskaya, Doctor of technical sciences, professor, head of the sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: iit@pnzgu.ru
Oleg V. Karpanin, Head of calibration and repair service, sub-department of information and measuring equipment and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: karpanino@mail.ru
Diana E. Tuzova, Student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: diana.tuzova.02@bk.ru
Mikhail A. Nelyutskov, Master degree student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: nelyuckovmihail@mail.ru
Aleksandr A. Danilov, Doctor of technical sciences, professor, director, The State Regional Center for Standardization, Metrology and Testing (20 Komsomolskaya street, Penza, Russia), E-mail: aa-dan@mail.ru
Dmitry V. Artamonov, Doctor of technical sciences, professor, first vice-rector, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: dmitrartamon@yandex.ru 

Background. Structures based on semiconductor materials are widely used in nano- and microelectronics devices. One of the promising directions is related to the production and research of transparent conductive films and structures based on them. The purpose of this study is to develop an automated information and measurement system for measuring the volt–ampere characteristics of semiconductor structures. Materials and methods. The information and measurement system is designed to study the volt-ampere characteristics of various semiconductor structures, including transparent conductive coatings obtained by spray pyrolysis on glass substrates. Results. The structure of the measuring unit of an automated information and measurement system is presented, which includes voltage and current measurement channels on the structure under study, as well as a thermal chamber, which allows us to study the temperature dependences of the electrical parameters of semiconductor components. Conclusions. A methodology for measuring the volt-ampere characteristics of semiconductor structures is described, which has been tested in the study of transparent conductive coatings synthesized on the basis of spray pyrolysis. Automation of measurement procedures has made it possible to reduce the time spent on the measuring process and eliminate the subjective components of measurement errors. 

automated measurements, information-measuring system, current-voltage characteristics, semiconductor 

Pecherskaya E.A., Karpanin O.V., Tuzova D.E., Nelyutskov M.A., Danilov A.A., Artamonov D.V. Automated information-measuring system for measurement of voltage characteristics of semiconductor structures. Izmerenie. Monitoring. Upravlenie. Kontrol' = Measuring. Monitoring. Management. Control. 2024;(3):41–46. (In Russ.). doi: 10.21685/2307-5538-2024-3-5