MODERN TECHNOLOGY OF MICROELECTROMECHANICAL SYSTEMS DESIGN 

Baranov Aleksandr Sergeevich, postgraduate student, engineer-constructor, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), Kamitte11@gmail.com

531.768.004.9

10.21685/2307-5538-2017-3-7

Background. The Russian market of microelectromechanical systems (MEMS devices) is filled by foreign sensors and devices, what shows an absence of the mass consumer on given products and owing to undemanding of this technology in Russia. The aim of work is a  theoretical research with use of modern software for design process of inertial MEMS devices.
Materials and methods. For definition and estimation of future output characteristics of developed sensitive element for MEMS accelerometer, the application of imitating modelling in software ANSYS were considered. Results. Analytical calculations and the results of imitating modeling of acceleration influence on sensitive element are presented and resonant frequency of element and maximum movement of inertial weight is defined. Conclusions. Output characteristics of developed sensitive element correspond to expectations, and, hence, the type of the given design should be used for further development of MEMS accelerometer.

MEMS-design, imitating modelling, ANSYS, accelerometer