THEORETICAL ASPECTS OF PULSE-CURRENT STABILIZATION OF RESISTANCE OF THIN-FILM RESISTORS OF PRIMARY CONVERTERS 

Utkin Kirill Eduardovich, postgraduate student, deputy head of the microelectronics workshop, Research Institute of Physical Measurements (8/10 Volodarsky street, Penza, Russia), E-mail: utkin.kirill.niifi@gmail.ru
Kolosov Pavel Alexandrovich, leading process engineer, Research Institute of Physical Measurements (8/10 Volodarsky street, Penza, Russia), E-mail: pavel.kolosov.54@bk.ru
Tsypin Boris Vulfovich, doctor of technical sciences, professor, sub-department of rocket-space and aviation instrument engineering, Penza State University (40 Krasnay street, Penza, Russia), E-mail: cypin@yandex.ru
Makarov Ivan Vasilievich, postgraduate student, design engineer, Research Institute of Physical Measurements (8/10 Volodarsky street, Penza, Russia), E-mail: niifi@sura.ru 

621.316.8 

10.21685/2307-5538-2020-4-7 

Background. Ensuring high and stable quality of thin-film resistors is currently one of the main tasks in the manufacture of primary converters; the problem of ensuring long-term stability of their output parameters remains urgent. One of the ways to stabilize the output parameters of thin-film resistors is the use of pulse-current processing at the stage of manufacturing thin-film resistors. The purpose of the work is to determine the optimal parameters of the impact on thin-film resistors by the pulse-current method in order to stabilize their output parameters.
Materials and methods. The definition of the main processes in the structure of a thin-film resistor, which affect the temporal stability of their output parameters, is carried out. Determination of the ratio between the pulse duration and its amplitude during processing by the pulse-current method is carried out.
Results. The optimal parameters of the impact on thin-film resistors by the pulse-current method have been determined. The formula for the relationship between the pulse duration and its amplitude is determined, which provides a sufficient temperature for structuring a thin resistive film. Conclusions on the basic principles of pulsecurrent stabilization are presented.
Conclusions. The data obtained make it possible to determine the optimal parameters for stabilizing thin-film resistors by the pulse-current method. 

stabilization of parameters of thin-film resistors, pulsed current stabilization, thin-film technology, specific heat of a resistive substance, pulse duration, amplitude of voltage pulses, diffusion, thin-film resistor, thermal conductivity