ANALYSIS OF THE PROPERTIES THIN-FILMS OF CHROME-NICKEL SYNTHESIZED BY SPRAYING FROM
AN INDEPENDENT SOURCE

Timakov Sergey Vladimirovich, deputy chief technologist, Research Institute of Physical Measurement (8/10 Volodarskogo street, Penza, Russia), info@niifi.ru
Khoshev Aleksandr Vyacheslavovich, candidate of technical sciences, engineer, Research Institute of Physical Measurement (8/10 Volodarskogo street, Penza, Russia), info@niifi.ru
Makushkin Denis Evgen'evich, adjuster radio-electronic equipment and devices, Research Institute of Physical Measurement (8/10 Volodarskogo street, Penza, Russia), info@niifi.ru
Khramov Andrey Sergeevich, adjuster radio-electronic equipment and devices, Research Institute of Physical Measurement (8/10 Volodarskogo street, Penza, Russia), info@niifi.ru

681.586.712.019.3 

Background. A method of reducing the temperature error in metal-film pressure sensors (DMD). The aim is to reduce the negative impact of temperature on the sensor element (SE) pressure sensors. The goal is to produce piezo-resistive film with minimal temperature coefficient of resistance (TCR).
Materials and methods. The process of implementation takes place by means of magnetron sputtering from separate sources. Thus as the sprayed material can be used as pure materials or alloys, compounds and specific content. The quantity of TCS thus strongly depends on the temperature at which the deposition process piezoresistive films «nickel-chrome».
Results. We propose a method of spraying piezoresistive films on a substrate for thin-film sensing element, which is a qualitative approach to reduce TCS by external factors.
Conclusion. The proposed method allows deposition in practical use to get the maximum technical effect in solving the technical problems to reduce the TCS in thin-film pressure sensors. To show structural and practical applicability of this method and indicates promising ways to improve it.

temperature error, the micro electromechanical systems, diffusion, x-ray spectral analysis