RESEARCH OF PROPERTIES OF HIGH-TEMPERATURE ELECTRODES FOR PIEZOELEMENTS 

Gulieva Dar'ya Aleksandrovna, process engineer, Scientific-research Institute of Physical Measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: dashuliy2308@yandex.ru
Chapanov Nikita Sergeevich, process engineer, Scientific-research Institute of Physical Measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: dashuliy2308@yandex.ru
Nevryuzina Tina Bakirovna, mastergraduate student, Penza State University (40 Krasnaya street, Penza, Russia); process engineer, Scientific-research Institute of Physical Measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: tina_nevruzina@mail.ru 

531.781.2.084.2 

10.21685/2307-5538-2020-1-9 

Background. Piezoelectric elements are widely used in modern technical devices for various purposes. The aim of the work is to study the effect of various types of metallized coatings on piezoelectric elements by magnetron sputtering.
Materials and methods. Models of piezoelectric elements sprayed with titanium-nickel were made using the magnetron sputtering method.
Results. The technology for spraying a high-temperature contact group of titanium-nickel was tested at the EvoVac vacuum magnetron sputtering device on a rotating carousel of substrates. Experimental prototype samples were made on silicon wafers with hightemperature titanium-nickel contacts, and the adhesion of the deposited film was verified by gold wire welding.
Conclusions. High-temperature electrodes were formed by the magnetron method on piezoceramic modules, which make it possible to spray electrodes on hightemperature piezoelectric materials by a bismuth titanate-niobate system. 

piezoelectric element, high-temperature electrodes, magnetron sputtering method, sensitive element, titanium-nickel, titanate-niobate of bismuth