DEVELOPING AND APPLICATION OF PRESSURE AND TEMPERATURE SENSORS BASED ON
MICROELECTROMECHANICAL SYSTEMS FOR PART SPACE-AND-ROCKET ENGINEERING 

Shokorov Vadim Aleksandrovich, design engineer, Scientific-research Institute  of physical measurements (8/10 Volodarskogo street, Penza, Russia), Shokorov58@gmail.com

531.781.2:629.7

10.21685/2307-5538-2017-3-9

Background. The subject of this study is semiconductor pressure sensors and temperature. The aim of this work is to develop a distributed pressure sensors and temperature based on microelectromechanical systems for space hardware operating at high values of the external influencing factors.
Materials and methods. The expediency of application of certain structural and technological solutions.  
Results. Given the developed design of the sensor. Conducted patent research proving the novelty of the application of developed technological solutions.
Conclusions. The proposed construction of a semiconductor pressure sensor and temperature will increase the reliability and the payload of the spacecraft, technical and metrological characteristics of the sensor are not inferior to domestic and foreign analogues, and on some parameters even surpass them.

pressure and temperature sensor, the basic load-bearing structures, microelectromechanical system, sensing element, metrological characteristics, polyimide loop