INVESTIGATION OF THE INFLUENCE OF CHEMICAL TREATMENT ON THE PROPERTIES OF SAMARIUM MONOSULFIDE IN THE PROCESS OF MANUFACTURING PRESSURE SENSOR CRYSTALS 

Makarov Ivan Vasil'evich, design engineer, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: Mackarof@mail.ru
Perelygina Aleksandra Vladimirovna, design engineer, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), E-mail:Aperelygina91@gmail.com
Chapanov Nikita Sergeevich, engineer-technologist, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: Jdarvin55@gmail.com
Shokorov Vadim Aleksandrovich, design engineer, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), E-mail: Shokorov58@gmail.com 

531.787.084.2.002.5 

10.21685/2307-5538-2019-4-9 

Background. The subject of research is a semiconductor sensitive layer of samarium monosulfide on a silicon substrate. The aim of the work is to develop a technology for the formation of an instrument layer on the surface of a sensitive element by a combined method and study of the effect on the composition of the applied SmS layer of the formation of silicon nitride, etching of SmS and the formation of metallization.
Materials and methods. As research methods were used: analysis of scientific and technical literature to determine the method of forming the instrument layer as well as experiment in which the chemical composition of SmS formed on a silicon substrate was determined after exposure to chemical treatment.
Results. In the course of the research, the optimal chemical reagents, the materials used and the photolithography modes that ensure the preservation of the chemical composition of SmS during the formation of the instrument layer were determined.
Findings. The technology proposed by the authors for the formation of the instrument layer from SmS will increase the temperature range of pressure measurement, sensitivity and linearity of the output signal, as well as radiation resistance of pressure sensors through the use of a wider-band material. 

samarium monosulfide, instrument layer, formation technology, chemical composition, photolithography, etching methods, pressure meter