EQUIPMENT FOR PACKET PULSE CURRENT PROCESSING OF THIN FILM TENSORESISTORS 

Cheburakhin Igor Nikolaevich, head of the microelectronics department, Scientific-research Institute of physical measurements (8/10 Volodarskogo street, Penza, Russia), niifi@sura.ru

537.39

Background. Pulse processing advanced electrical loads allows the structure (stabilization) of the resistive layer, to carry out the adjustment (trimming) of the value of the resistor to the desired nominal value. Development of specialized equipment allowing for a batch pulsed current processing of thin-film strain gauges, is an urgent task.
Materials and methods. Equipment developed on the basis of the following principles: processing of thin-film TR package electrical pulses; choice of parameters of the stabilizing electric pulses to heat the thin film of TR over the time the impulse has reached the temperature of intensive oxidation; choice of electric pulse parameters fit so that heating of the thin-film TR for the pulse time not reached temperature the diffusion of resistive and dielectric insulating thin-film layers; the need to complete all the events in TR processes during the pause between pulses; control parameters TR in the pauses between pulse packets; carrying out treatment on air under normal climatic conditions.
Results. Describes the block diagram and the operation of the device. The sequence of operations for stabilizing and adjusting the resistance of the strain gages.
Conclusions. The use of the developed system simplifies the adjustment of sensors and increases their thermal stability.

tensoresistor, stabilization, trimming, batch pulse-current handling